A comprehensive review of micro-grinding: emphasis on ...
Micro-grinding is a tool based mechanical micromachining process which is mostly applied to create and finish 3D micro-features on hard and brittle materials such as glass, silicon, alumina, etc. Miniature-sized abrasive tool comes in physical contact with the workpiece and removes the unwanted material with mostly nanometric undeformed chip thickness and …
اقرأ المزيد